Abstract: In semiconductor manufacturing, a multifunctional process module (MPM) can perform multiple processing steps by adjusting its functional settings. This enhances the reconfigurability of ...

Here is a list of example that are typical use cases for the module. To find more examples of how to use the module, please refer to the examples folder. Alternatively, you can use the Get-Command ...

Abstract: In semiconductor manufacturing, to improve the throughput of cluster tools, process modules (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM ...

We've completely refactored our PowerShell module to expand service availability and improve functionality. Customizable installation. Built using a submodule approach that groups commands by product ...